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Semi, Kazuhiko
Semi, Kazuhiko
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n型6H-SiCに対する化学エッチングおよび電極形成 : 結晶面方位依存性
Authors
Otsubo, Mutsuyuki
/
Semi, Kazuhiko
/
Miyamoto, Takashi
/
Yamamoto, Kohei
/
Ikeuchi, Hiroyuki
/
Chiba, Tetsuya
/
Journal Title
Bulletin of the Faculty of Education, Wakayama University. Natural science
Volume
54